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Highly conformal atomic layer deposition of tantalum …
Website URL:
http://faculty.chemistry.harvard.edu/files/gordon/files/hcaldt.pdf
Category:
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D.M. Hausmann et al. / Thin Solid Films 443 (2003) 1–4 3 Fig. 2. RBS data for a tantalum oxide film grown at 250 8C. Fig. 3. SEM images of a coated high aspect ...
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